AtomicLimits

Role of ions during PEALD
Role of ions during PEALD
Spatial ALD printer
Spatial ALD printer
Direct-write ALD
Direct-write ALD
Area-selective ALD: A stop motion movie
Area-selective ALD: A stop motion movie
Animation of ALD and Spatial ALD
Animation of ALD and Spatial ALD
"Isotropic Plasma ALE of Al2O3 using SF6 plasma and TMA", ALE Student Award 2020, Nicholas Chittock
Animation of plasma generator
Animation of plasma generator
AtomicLimits ALD database promo-video
AtomicLimits ALD database promo-video
Coburn & Winters Student Award talk:
Coburn & Winters Student Award talk: "Evidence for low-energy ions influencing plasma ALD of SiO2"