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Featured research:
Pyroelectric Heat Detection for Calibrated Measurement of Atomic Layer Deposition Reaction Heat
Ashley R. Bielinski, Emily A. Sprague-Klein, Brian T. Phelan, and Alex B. F. Martinson
Chem. Mater. 2021, 33, 15, 6176–6185
https://doi.org/10.1021/acs.chemmater...

Atomic layer deposition (ALD) precursors and processes have been identified that enable the deposition of materials that span the periodic table. However, the detailed mechanisms, kinetics, thermodynamics, and complexities of even the most well-studied ALD half-reactions remain insufficiently resolved experimentally to test present computational hypotheses. In this work, a pyroelectric calorimeter is designed, implemented, calibrated, and electrically modeled to enable quantitative ALD reaction heat detection. The operation and response of three ALD calorimeter designs were evaluated for use as absolute ALD half-reaction heat detectors. The most effective design was calibrated in situ before being utilized to measure the heat generated by the reaction of trimethylaluminum with a hydroxylated alumina surface to produce 96 μJ/cm2 over a reaction time of ∼30 ms. With thermal and temporal resolutions down to 0.1 μJ/cm2 and 50 ns, respectively, this sensitive and ultrafast probe is poised to improve our fundamental understanding of numerous ALD reaction mechanisms through quantitative comparison with first-principles computation predictions.