Скачать или смотреть MegPie® - Single Wafer Megasonic Cleaner from ProSys Inc.

The MegPie® megasonic transducer by ProSys Inc. is for non-contact cleaning or sonochemical processing a single rotating substrate. It applies a radially uniform dose of acoustic energy to improve process results with low operating costs. Operating conditions are continuously measured to ensure consistent outcomes.

RADIALLY UNIFORM FIELD APPLIES EVEN DOSAGE
PRE ≥ 98% for particles down to 19 nm
Every portion of the wafer
For every wafer processed

SINGLE CRYSTAL SAPPHIRE RESONATOR
Chemistry flexibility
Zero particles added
No surface pitting
Stainless steel for solvent applications

LOW OPERATING COSTS
MTBF ≥ 209,000 hours
No PM, no consumables
Less than 1 lpm process fluid for 300mm wafer

IMPULSE MONITORS OPERATION
Sonic dosage
Reflected power
Temperature
Electrical parameters