Скачать или смотреть RENA Inception – Single Wafer Processing Tool

The RENA Inception is the perfect compact semi-automated single wafer processing system. It is an ideal solution for wet chemical cleaning, etching and resist tripping processes. The platform is enabling the transition from R&D to pilot production in semiconductor manufacturing. The RENA Inception can be applied for acid applications in FEoL as well as solvent applications in BEoL. It provides superior etch uniformity within wafer, from wafer to wafer and from lot to lot.

Learn more online: https://www.rena.com/en/

Features and Benefits:
Provides process consistency to develop your POR
Etch uniformity exceeds batch systems
FEoL (Acid) & BEoL (Solvent) processing applications
Manual or automated wafer handling
Wafers up to 200mm and masks up to 7 x 7
Dual moving spray arms with separate chem lines
Stationary bottom spray nozzles for DI and N2
Multi-step processing
2 to 4 chemical process tank
Manual or automated wafer handling
Single or dual load ports
Low utility consumption
Small Footprint
Highly flexible software