Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes

Описание к видео Dry Etch TPT Training - ICP’s and Pegasus software: #2 Recipes

This video describes the process recipes used on the newest SPTS tools. The information includes the process recipe components and the process parameters along with general recipe management (view, copy, edit etc.) and folder structure.

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