Smart Semiconductor Production Automation by Autonomous Robots with Advanced Handling Functionality

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Self-Navigating Systems (SNS), also called Automatic Guided Vehicles (AGV), which are able to move and handle the highly sensitive payloads (not only wafers but also reticles, FOUPs, spares and wears, etc.) autonomously in semiconductor fabs, play an important role in flexible material handling automation to stretch the limits of traditional fab transport systems. Flexible production methods require flexible automation concepts.
Video shows the main results of Fabmatics’ leading-edge next-generation AGVs developed with Productive 4.0 funded project.

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