White light interferometer for nanometer distance measurements

Описание к видео White light interferometer for nanometer distance measurements

Unlike conventional interferometers, Micro-Epsilon's IMS5400-DS enables stable measurement of profiles without signal loss. This video shows a high-resolution XY scan of a wafer. Here, the white-light interferometer detects height differences of landings, steps and depressions down to the submicrometer range.

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