Debugging MEMS Process Flows with Physical Simulation.mp4

Presenter: Thomas Hall, Intellisense Corporation.

IntelliSuite was the first MEMS-specific CAD tool and has been under active development for over 20 years. Traditionally, process flow simulation has been performed using geometrical approximation methods. While effective, certain processes will not be simulated with adequate accuracy. This webinar will explore the benefits of physical process simulation. IntelliSense has been known for their physical process simulation tools like RECIPE, IntelliEtch, and Exposure. All of this functionality is now integrated into a new process simulator, FabSim. In this webinar, we will quickly create photo-realistic process models using full physical simulation. We will compare the different methods and explore how physical simulation can save valuable time and cost in the cleanroom by eliminating unneeded fabrication iterations. The examples explored will include some popular process design kits involving multiple processes.