How Photolithography works | Part 4/6 – Imaging Process

Bernd Geh | The Key of Micro- and Nanoelectronics: Basics of Photolithography
Optics is a key technology with inspiring applications – such as in the production of increasingly powerful microchips. As a global technology leader in lithography optics and equipment, ZEISS is shaping the nanoelectronics age. This way ZEISS enables the continuation of Moore‘s Law, and with that the steady progress of the semiconductor industry.
Learn key aspects of the world of advanced optics for nanoelectronics in this recording of Bernd Geh’s talk on “The Key of Micro- and Nanoelectronics”. The six videos will give you an insight into the Basics of Photolithography. The learning videos are triggered by the Important Project of Common European Interest (IPCEI).

► Part 1: Introduction:    • How Photolithography works | Part 1/6...  
► Part 2: Photolithography Basics:    • How Photolithography works | Part 2/6...  
► Part 3: Photoresist:    • How Photolithography works | Part 3/6...  
► Part 4: Imaging Process
• Basics of optical imaging
• Resolution and how to push the limits of resolution
• Optical Proximity Correction and Source Mask Optimization
• Aberrations and polarization
► Part 5: Metrics for Lithography:    • How Photolithography works | Part 5/6...  
► Part 6: Resolution Enhancement:    • How Photolithography works | Part 6/6...  

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