Sam Sivakumar of Intel talks about Lithography and Patterning: Part 2

Описание к видео Sam Sivakumar of Intel talks about Lithography and Patterning: Part 2

Sam Sivakumar of Intel talks about Lithography and Patterning
- Issues with Double Patterning
- EUV
- Challenges with EUV lithography and their status

Stanford University's class on nanomanufacturing, led by Aneesh Nainani.

Oct 3, 2012
Week 2, Lecture 4, Part 2

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