NASCENT Nanomanufacturing Bootcamp: Deposition Processes

Описание к видео NASCENT Nanomanufacturing Bootcamp: Deposition Processes

Table of Contents:

00:17 - Spin Coating
01:01 - Sputtering
01:50 - Chemical Vapor Deposition
02:38 - ALD: Atomic Layer Deposition
02:52 - Introduction: ALD
04:48 - Conformal films
05:35 - Primary Components
06:29 - ALD Process Window
07:29 - Precursors
08:47 - Plasma Enabled (PE) ALD
09:52 - Comparison
11:29 - Etching

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