Webinar Series: Sample Preparation for In Situ TEM Part 3

FIB Preparation for In Situ Transmission Electron Microscopy

Mr. Roberto Garcia | North Carolina State University
Topic: Tips for FIB Preparation of In Situ Samples
Roberto Garcia will be discussing tips and tricks that he has developed to help improve the FIB lift-out procedure for making samples to place on Protochips in situ chips. The talk will follow closely the video made by Protochips which incorporates a double 45 degree holder for sample placement.

Dr. Vesna Srot | Max Planck Institute for Solid State Research
Topic: Preparation of High-Quality Samples for MEMS-Based In-Situ Electrical and Electro-Thermal (S)TEM Experiments
Dr. Vesna Srot will present a novel and optimized FIB-based methodology for preparing contamination and damage-free samples on MEMS chips for in-situ electrical and electro-thermal experiments in (S)TEM. Newly developed FIB sample preparation routine minimizes attachment/detachment steps and reduces the use of Pt fixation owing to an alternative geometry. The quality of produced lamellae on a chip resembles the quality of a classical FIB-prepared sample. Various sample preparation parameters and the performance of in-situ prepared samples have been evaluated through electrical-biasing experiments.