Скачать или смотреть TUT Microlaser Platform full

TUT -- MICROLASER PLATFORM is a complete laser micromachining workstation accepting several different lasers. Platform has several advanced features build in. - Automatic surface profile compensation - High performance linear servo stages - Microscope camera system - High accuracy surface profiling - Automatic report generation - Quick laser setup - Operates in cleanroom environment Motion system uses Etel linear drives. Highest single axis velocity of the system is 2400mm/s with acceleration up to 2g. System path velocity is 500 mm/s while maintaining the path accuracy of ±2 µm. System is mounted with a 200X microscope camera and a confocal 3-D sensor with 10nm measurement resolution in Z-direction.
Platform modifications were partly funded by following projects: LIFT, EU FP7 (http://www.lift-project.eu/) and National Tekes project iiLase.