Скачать или смотреть STS Mutiplex Cluster ICP Asher (Three Chamber)

http://www.semistarcorp.com/product/s...

STS Mutiplex Cluster Three Chamber
Model: STS Mutiplex Cluster
Category: Used Equipment List - Etch RIE ICP

Original Equipment Manufacturer: Surface Tech Sys ( STS )

Condition: In warehouse, Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Valid Time: Subject to prior sale

Lead Time: Ready to go. 12 to 16 weeks for the Refurbished and fully tested condition.

Location: Asia

Warranty: No warranty for the AS IS,WHERE IS condition. 3 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

Surface Tech Sys (STS) STS Mutiplex Cluster Description:
STS Multiplex Cluster ICP Etcher, 8″
Brooks VCE4 and Mtr5 robot
Turbo on the wafer handler
C033 Cluster handler
(2) Temperature controlled lids
Loadlock: Brooks VCE 4 with manual door
Corema chiller on Metal ICP chamber
ICP chamber (Metal etch)
12 process gas manifold
Bias capabilities
Chuck: heat exchanger, no electric
Turbo pumps: TMH100
ICP chamber(Dielectric Etch)
12 process gas manifold
Bias capabilities
Processed: silicon etch
Chuck: heat exchanger, no electric
Turbo pump: TMH100
ICT chamber (Asher / Stripper)
4 gases: N2, O2, NH3, CF4
Turbo pump
NOAH chillers
Vacuum Pumps are not included