Скачать или смотреть Inside the EFEM

This video shows a SCARA robot inside an EFEM (Equipment Front End Module) moving a wafer inside a process chamber. The robot is picking the wafer from an input load port and then places it back into an output load port.
It uses a horseshoe end effector with vacuum to hold the wafer on the arm during the movement.

The system is controlled by an application derived from Agil'Controller template application based on A²ECF-SEMI framework from Agileo Automation.
More information: https://www.agileo.com/en/solutions/p...

A²ECF-SEMI supports many robots and EFEM and thanks to its modular architecture it is very easy to add new ones.

This video was taken during SEMICON Europe show.