CRM200 - A MEMS Vibrating Structure

“The CRM200 is a silicon MEMS vibrating structure(ring) gyroscope. The stack-up of this part actually consists of a MEMS ring on top of the main ASIC via a small silicon spacer. The bond wires you see are coming from the top of the MEMS ring, go through open spaces in the ring, and then are bonded directly to the ASIC.

There are actuators/transducers that are located around the outer perimeter of the ring via traces that go along the spokes. These transducers detect the radial motion caused by either the set of primary drive actuators, or by what is known as the Coriolis effect. As the gyroscope rotates about the sensing axis, these forces from the Coriolis effect act on the ring and cause radial movement at the rings perimeter.

I would highly recommend checking out the datasheet, because it goes into much more detail about the theory of operation at the end of it.

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