Скачать или смотреть Motorized XY-stage using linear motors

This motorized XY-stage was designed and manufactured by the idonus team to address several technical requirements specific to the processes in high vaccum chambers (for example, for surface treatment by ion implantation).

One of the constraints of high vaccum is related to the space available in height (the smaller it is, the better it is in order to reduce the volume of the vaccum chamber, and thus the time needed to reach a high vacuum).

In a classical mechanism, two linear stages are simply stacked one on top of the other, but this principle makes the systems bulky. In this video, we show a smart design that consists of two linear induction motors moving along the same linear bearing. Such a configuration makes it possible to construct a compact XY-stage.

It is to be noted that all materials were carefully chosen to be suitable for use in a high vacuum environment.