Webinar: De-mystifying Spatial Resolution of Fizeau Interferometers

Fizeau interferometry has come a long way in the last decade. Driven by the need to qualify smaller features and mid-spatial frequency content, interferometers have been developed with extraordinary lateral resolution capability. But, resolution capability is much more than the pixel count of the sensor.

This webinar explores the drivers for high-resolution interferometry and the methods to reliably qualify an interferometer’s ability to resolve lateral features – known as the Instrument Transfer Function.

Topics covered include:
• Sources of mid-spatial frequencies in optical surfaces and the impacts on end-use optical systems.
• Interferometer response to surface information as a function of spatial frequency.
• How to reliably qualify and quantify the ITF of an interferometer to ensure the spatial frequency response is appropriate for the metrology it is intended to provide.

Citations mentioned in the video:
[1] https://www.zygo.com/library/papers/C...
[2] https://www.zygo.com/library/papers/F...
[3] https://www.zygo.com/library/papers/A...