Скачать или смотреть ELECTRICAL CONDUCTIVITY AND ACTIVATION ENERGY OF HETEROEPITAXIAL DIAMOND

ELECTRICAL CONDUCTIVITY AND ACTIVATION ENERGY OF HETEROEPITAXIAL DIAMOND
Maddy Behravan, Converse University, United States of America

(Presented at the International Conference on Life Sciences, Engineering and Technology (iLSET) April 21-24, 2022, Los Angeles, CA, https://www.2022.ilset.net/ organized by International Society for Technology, Education and Science ((ISTES)-http://www.istes.org)

Diamond is an attractive material for high power electronic devices because of its unique properties such as wide band-gap and high thermal conductivity. Heteroepitaxial growth of diamond offers the possibility of making devices over a large surface area. In order to characterize electrical properties of heteroepitaxial diamond and address its suitability for electronic application, a diamond device is fabricated from a nominally undoped heteroepitaxial diamond film. The diamond film was grown using plasma enhanced chemical vapor deposition (PECVD). Here the temperature-dependent DC electrical conductivityof heteroepitaxial diamond is reported. Owing to its extremely low conductivity at room temperature, measurements of current-voltage characteristics were made between 300 °C and 550 °C. A particular technique was used to measure electrical conductivity of heteroepitaxial diamond at high temperature, which provided for a precise measurement circuits enabling thermal control with sufficient stability for electrical measurements of very small currents (10-13 A). Ohmic contacts with diamond and procedures for preparing diamond surface will be addressed. In this study, a single activation energy of 1.40 eV is found for the diamond device. The heteroepitaxial diamond conductivity profile closely matches that of previously studied natural Type IIa diamond. A thermally activated electrical conductivity, with single activation energy 1.40 eV, does not match natural diamond, but does match previously studied homoepitaxial diamond, suggesting the presence of electronic states comparable with synthetic diamond.