Скачать или смотреть Why is the wafer stage important in High NA EUV lithography? | ASML

In this video, Greet Storms, head of product management for High NA extreme ultraviolet (EUV) lithography at ASML, walks you through the wafer stage’s pivotal role in advanced chipmaking. You’ll see two wafer tables magnetically levitating, a robotic arm loading a wafer through the vacuum load lock and a wafer getting electrostatically clamped in place.

Discover how advanced alignment sensors map specific markers on the wafer to position it accurately for lithography, while leveling sensors create an exact map of the wafer’s topology. Watch EUV light – carrying the pattern for a chip layer – get focused by multilayer mirrors we developed with ZEISS. See the light scan across the wafer in an S-shape to expose the chip pattern in just seconds.

Learn how the wafer stage in High NA EUV lithography enables ultra-fast and hyper-precise positioning for mass-producing the world’s most advanced microchips.

Watch more about High NA EUV lithography on our playlist:    • High NA EUV lithography  

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