Скачать или смотреть TAZMO EFEM — 晶圓自動化搬運的核心中樞

來自日本自動化技術領導品牌 TAZMO 的 EFEM（Equipment Front End Module），整合晶圓搬運、對位與臨時儲存等多項關鍵功能，是半導體製程中不可或缺的自動化中樞。
TAZMO EFEM 採用高剛性低振動設計與精密驅動系統，搭載自家開發的真空與大氣雙模機械手臂，確保晶圓在各製程間轉移時維持最高潔淨度與穩定性。
模組化架構設計可依客戶需求進行客製化配置，靈活整合各式製程機台，實現智慧化、自動化、高效率的生產流程。
憑藉日本製造的精密品質與嚴謹工程精神，TAZMO EFEM 為次世代半導體生產線提供最可靠的前端自動化解決方案。由 允越科技 正式代理，提供專業導入與在地技術支援。
From Japan’s leading automation technology brand TAZMO, the EFEM (Equipment Front End Module) integrates wafer transfer, alignment, and buffer functions—serving as the essential automation hub within semiconductor manufacturing processes.

Designed with a high-rigidity, low-vibration structure and equipped with TAZMO’s proprietary vacuum and atmospheric robot arms, the EFEM ensures ultra-clean, stable wafer transfer between process tools.

Its modular architecture allows for flexible customization and seamless integration across multiple process systems, enabling smart, automated, and highly efficient production environments.

With Japan’s precision engineering and uncompromising quality, TAZMO EFEM delivers the most reliable front-end automation solution for next-generation semiconductor fabs. Officially represented by Yun Yue Technology, providing expert integration and local technical support.