MKS P Series Mass Flow Controllers

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.

The P-Series MFCs, with full scale ranges from 5 sccm to 250 slm (Nitrogen equivalent) are designed for critical mass flow applications like those required in semiconductor and high end MOCVD applications. Its 1.125" width is designed for use in compact and modular gas panels. In addition to its multi-gas, multi-range capabilities, the P-Series (P9 model) with its integral pressure transducer, offers a pressure insensitive capability that maintains tight flow control in the event of an upstream pressure disturbance.

The P-Series MFCs' multi-gas, multi-range capabilities are enabled with gas parameters already stored in memory, providing tight and repeatable flow accuracy for the selected gas. An Ethernet interface facilitates changes in device range and gas, as well as remote performance monitoring. Most controllers are metal sealed and electropolished for high purity applications, and are available in a broad range of interfaces, including RS485, Profibus and Devicenet.

Learn more: https://www.mksinst.com/c/p-series-ma...

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About MKS Instruments
MKS Instruments is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Additional information can be found at www.mksinst.com.

MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, Massachusetts 01810
USA

Tel: 978-645-5500
Fax: 978-557-5100
[email protected]
www.mksinst.com