Unlocking the secrets of conformality, Plasma-Enhanced ALD

Описание к видео Unlocking the secrets of conformality, Plasma-Enhanced ALD

In this enlightening webinar, Professor Erwin Kessels will be presenting about the conformality of plasma-enhanced ALD. He addresses the importance of this kind of work and introduces the ALD growth regimes in 3D structures. In addition, He discusses the latest research breakthroughs in both low-pressure plasma-enhanced ALD and atmospheric pressure plasma-enhanced spatial ALD in which the PillarHall test chips are employed.

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