Quadrupole mass spectrometery (QMS) system for challenging semiconductor processes

The performance and reliability of Quadrupole Mass Spectrometry (QMS) Systems have been improved significantly over the last few years and they are widely used to monitor, optimize and control different vacuum-based processes. There are several developments with respect of improving sensitivity, detection limits and robustness which enabling the use of mass spectrometer to monitor critical process conditions such as CVD, ALD/ALE, etch and other processes.

In this webinar we provide some guidance in selecting and operating quadrupole mass spectrometry (QMS) systems for challenging applications. We have also discuss various methods of system implementation to enhance the value of an integrated QMS based process monitor.

Our wide range of powerful, versatile, and proven mass spectrometry-based solutions deliver a new level of understanding and control in vacuum and gas-related applications to customers https://www.mksinst.com/c/mass-spectr...

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About MKS Instruments
MKS Instruments is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Additional information can be found at www.mksinst.com.

MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, Massachusetts 01810
USA

Tel: 978-645-5500
Fax: 978-557-5100
[email protected]
www.mksinst.com