Cleanline® Foreline Plasma Clean System for removing CVD and Etch processes byproducts and deposits

This video showcases an innovative Foreline Plasma Cleaning system, that enables direct plasma-based cleaning in the foreline. This compact system utilizes the identical chemistry as the Chamber Clean process and is specifically designed to seamlessly integrate into the densely packed foreline without affecting its conductance.

The MKS Cleanline® Foreline Plasma Clean System increases tool uptime and productivity by continuously removing process byproducts and deposits from CVD and Etch system pumping lines.
For more information visit - https://www.mks.com/f/cleanline-forel...

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About MKS Instruments
MKS Instruments is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Additional information can be found at www.mksinst.com.

MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, Massachusetts 01810
USA

Tel: 978-645-5500
Fax: 978-557-5100
[email protected]
www.mksinst.com